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Atomic Percent

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Atomic ratio
The atomic ratio is a measure of the ratio of atoms of one kind (i) to another kind (j). A closely related concept is the atomic percent (or at.%), which gives the percentage of one kind of atom relative to the total number of atoms. The molecular equivalents of these concepts are the molar fraction, or molar percent.

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Integrated Circuit Dictionary

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Atomic Percent
the number of atoms of an element per unit volume divided by the number of atoms per unit volume of the substance containing the element.

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