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Radio frequency microelectromechanical system
A radio frequency microelectromechanical system (RFMEMS) is a microelectromechanical systems with electronic components comprising moving sub-millimeter-sized parts that provide radio frequency functionality. RF functionality can be implemented using a variety of RF technologies. Besides RF MEMS technology, III-V compound semiconductor (GaAsGaNInPInSb), ferriteferroelectricsilicon-based semiconductor (RF CMOSSiC and SiGe), and vacuum tube technology are available to the RF designer. Each of the RF technologies offers a distinct trade-off between cost, frequencygain, large-scale integration, lifetime, linearitynoise figurepackagingpower handlingpower consumptionreliability, ruggedness, size, supply voltageswitching time and weight.

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